The measurement of chip moisture content（MC）,based on capacitance,was researched.The results from the experiments showed that with given conditions there would be some functional relations between the MC of the chips and the value of their capacitance that were exponential when 5%≤MC<25% and were linear when 25%≤MC<150%.At these conditions the chip MC could be measured through its capacitance.Models also included chip length,width,and thickness as these had some effect on coefficients that were included as correction factors.